A reversible photo-induced change has been observed in the polarizatio
n dependence of a transverse electro-absorption signal for hydrogenate
d amorphous silicon, which is indicative of the occurrence of structur
al change in the whole material. The change proceeds rapidly under ste
ady light exposure until saturation is reached, while the decrease in
the photoconductivity becomes significant just after saturation. These
observations convince us that a large-scale photostructural change is
involved in the photo-induced degradation of the electronic propertie
s of the material in addition to the creation of metastable dangling b
ond defects.