EVALUATION OF OZONE CONDENSATION SYSTEM BY THERMAL-DECOMPOSITION METHOD

An ozone condensation system is evaluated from the viewpoint of an ozo ne supplier for oxide thin film growth. Ozone is condensed by the adso rption method and its concentration is analyzed using the thermal deco mposition method. The concentration of ozone exceeds 90 mol% and ozone is supplied for a sufficiently long time to grow oxide thin films. In vestigation of the ozone decomposition rate demonstrates that ozone ca n be transferred into the film growth chamber without marked decomposi tion. The ozone concentration is also evaluated using a quadrupole mas s analyzer and the accuracy of this method is compared with the result s of the thermal decomposition method.