An attempt has been made to understand and explain the relationship be
tween soft magnetism and nitrogen content in single layer FeTaN films
deposited by de magnetron sputtering. The effect of nitrogen content o
n film microstructure, crystallite size, saturation magnetization, mag
netostriction, and coercivity is analyzed. Clear trends emerge from th
is analysis. A linear relationship exists between nitrogen content and
all the properties mentioned above with the exception of coercivity.
The coercivity is observed to decrease suddenly on the addition of nit
rogen, then remain flat over a large range of nitrogen contents, final
ly increasing rapidly at high nitrogen contents. Permeability and anis
otropy field measurements are also reported.