THE EFFECT OF SURFACE-TOPOGRAPHY ON THE SOFT-MAGNETIC PROPERTIES OF FEALN FILMS

FeAlN films were deposited on patterned lines of photoresist, hardcure d before deposition, as well as on bare, hat substrates inclined at an angle to the sputter source. Both of these geometries were intended t o examine the effect of oblique incidence deposition on the anisotropy of reactively sputtered FeAlN films. Films on topographic substrates showed anisotropy fields of up to 75 Oe, while films on bare tilted su bstrates showed anisotropy fields up to 100 Oe, presenting the possibi lity of low permeability in the sloping regions of thin him recording heads which utilize these materials for inductive head poles.