EFFECTS OF AL MICRO-BUMPS ON THE MAGNETIC-PROPERTIES AND MORPHOLOGY OF COCRTA CR/AL THIN-FILMS/

CoCrTa thin films were deposited on glass substrates at various temper atures with or without. Al micro-bumps. The coercivity of the CoCrTa t hin films increased considerably by introducing the Al micro-bumps as a texture layer. The cause of the coercivity increase was attributed t o the development of strong Co(10 (1) over bar 0) texture and refineme nt of Co grains induced by small Cr grain when the films were deposite d on the Al bumped substrates. The morphology of the CoCrTa/Cr/Al thin films was very sensitive to the Al micro-bump distributions.