The crystal structure of the crystallites in CoSm thin films deposited
on Cr underlayer was studied by nanodiffraction and high resolution e
lectron microscopy (HREM). It was found that the crystallites have a d
osed-packed structure, Some nanodiffraction patterns taken from differ
ent crystallites using a two nanometer probe can be indexed by two lay
er stacking AB (HCP structure), three layer stacking ABC (FCC structur
e), and four layer stacking ABAC (double hexagonal structure), suggest
ing that a particular local stacking mode could exist, [11 (2) over ba
r 0] HREM images confirmed that the stacking sequence changes within o
ne crystallite, In local regions, random stacking, and unit cells of t
wo layer stacking AB, three layer stacking ABC, and four layer stackin
g ABAC were found.