The influence of the electrodes on the dielectric behavior and especia
lly on the leakage behavior of SrTiO3 thin films was investigated by i
mpedance analysis. Based on measurements on thin films with different
electrode materials the work function of these materials was found to
determine the leakage currents. The main conduction mechanism is therm
ionic emission of electrons from the cathode into the SrTiO3 thin film
. The current-voltage characteristics are influenced by the Schottky e
ffect. (C) 1995 American Institute of Physics.