U. Breuer et al., COMPARATIVE-STUDIES OF MCS(-SIMS AND E(-)-BEAM SNMS FOR QUANTITATIVE-ANALYSIS OF BULK MATERIALS AND LAYERED STRUCTURES()), Fresenius' journal of analytical chemistry, 353(3-4), 1995, pp. 372-377
For the quantification of heterostructure depth profiles the knowledge
of relative sensitivity factors (RSF) and the influence of matrix eff
ects on the measured profiles is necessary. Matrix dependencies of the
measured ion intensities have been investigated for sputtered neutral
mass spectrometry (SNMS) and MCs(+)-SIMS. The use of Cs as primary io
ns for SNMS is advantageous compared to Ar because the depth resolutio
n is improved without changing RSFs determined under Ar bombardment. N
o significant amount of molecules has been found in the SNMS spectra u
nder Cs bombardment. Using MCs(+)-SIMS the RSFs are matrix dependent.
An improvement of depth resolution can be achieved by biasing the samp
le against the primary ion beam for SNMS due to a reduction of the net
energy of the primary ions and a resulting more gracing impact angle.