The solution of the problem of interchangeability of surface analytica
l data is gaining increasing importance in multi-method surface analys
is. There are various surface analytical instruments in different labo
ratories on several automation levels. For these instruments, which ar
e controlled by computer systems working with proprietary software und
er various operating systems, a standardised data format is necessary
to allow an exchange of data. Therefore, a toolkit has been developed
for the transfer, archiving and editing of surface analytical data in
a standardised public domain format. This format contains all availabl
e and necessary information on experimental conditions and all paramet
ers specific for a number of analytical techniques such as AES, SAM, X
PS, SIMS, STM, AFM and EPMA. Additionally, all data concerning the con
ditions of sample-preparation and measurement history are included in
order to allow a well-founded evaluation of the data and improved repr
oducibility of the experiment.