DEPTH PROFILING BY ARXPS IN SURFACE-ANALYSIS

Authors
FISCHER H SVAGERA R EBEL H EBEL MF SCHOSSMANN B
Citation
H. Fischer et al., DEPTH PROFILING BY ARXPS IN SURFACE-ANALYSIS, Fresenius' journal of analytical chemistry, 353(3-4), 1995, pp. 473-477
Citations number
13
Categorie Soggetti
Chemistry Analytical
Journal title
Fresenius' journal of analytical chemistry → ACNP
ISSN journal
09370633
Volume
353
Issue
3-4
Year of publication
1995
Pages
473 - 477
Database
ISI
SICI code
0937-0633(1995)353:3-4<473:DPBAIS>2.0.ZU;2-H
Abstract
A method of nondestructive depth profiling in near surface regions of solids is described. Models have been discussed from which algorithms for evaluation of measured data are obtained. The algorithms, based on standard profiles with free parameters, have been adjusted to the dat a resulting from angle resolved XPS (ARXPS) by means of least squares fits. Depth profile analyses and segregation studies were performed on Pt-Ni and Fe-S specimens.