H. Oka et al., MAGNETIC FLUID BASED VARIABLE INDUCTORS FOR INDUCTIVELY-COUPLED PLASMA APPLICATIONS, IEEE transactions on magnetics, 31(6), 1995, pp. 4175-4177
This paper identifies a resonant LCC circuit zero voltage switched pow
er supply topology which can be used in conjunction with a variable in
ductor in inductively coupled plasma applications. Steady state, funda
mental component, simulation results confirm that the use of a variabl
e inductor allows the operating power range for zero voltage switching
to be extended without having to change the switching frequency.