MAGNETIC FLUID BASED VARIABLE INDUCTORS FOR INDUCTIVELY-COUPLED PLASMA APPLICATIONS

Citation
H. Oka et al., MAGNETIC FLUID BASED VARIABLE INDUCTORS FOR INDUCTIVELY-COUPLED PLASMA APPLICATIONS, IEEE transactions on magnetics, 31(6), 1995, pp. 4175-4177
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
ISSN journal
00189464
Volume
31
Issue
6
Year of publication
1995
Part
2
Pages
4175 - 4177
Database
ISI
SICI code
0018-9464(1995)31:6<4175:MFBVIF>2.0.ZU;2-5
Abstract
This paper identifies a resonant LCC circuit zero voltage switched pow er supply topology which can be used in conjunction with a variable in ductor in inductively coupled plasma applications. Steady state, funda mental component, simulation results confirm that the use of a variabl e inductor allows the operating power range for zero voltage switching to be extended without having to change the switching frequency.