BEAM-INDUCED PHASE-TRANSFORMATIONS AND SELF ANNEALING IN AS-IMPLANTEDIRON SILICIDES

Authors
CRECELIUS G RADERMACHER K DIEKER C MESTERS S
Citation
G. Crecelius et al., BEAM-INDUCED PHASE-TRANSFORMATIONS AND SELF ANNEALING IN AS-IMPLANTEDIRON SILICIDES, Applied surface science, 91(1-4), 1995, pp. 50-55
Citations number
15
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
91
Issue
1-4
Year of publication
1995
Pages
50 - 55
Database
ISI
SICI code
0169-4332(1995)91:1-4<50:BPASAI>2.0.ZU;2-H
Abstract
Using spatially resolved energy-loss spectroscopy, electron diffractio n, and He+-ion channeling we have observed the evolution of alpha-Fe d isilicide layers from primary crystallographically badly defined FeSi2 precipitates with increasing Fe dose in as-implanted specimens at con stant target temperature. Increasing the Fe+ dose transforms secondary metallic alpha-FeSi2 first into semiconducting beta-FeSi2 and then in to FeSi. Elevated target temperature at constant dose also causes tran sformation of the secondary alpha-FeSi2 into beta-phase. Results are i nterpreted in terms of beam induced crystallisation.