THE EFFECT OF ION-IMPLANTATION ON THE PROPERTIES OF AL FILMS

Authors
ZABOROWSKI M BARCZ A GAWLIK G RANGELOW IW
Citation
M. Zaborowski et al., THE EFFECT OF ION-IMPLANTATION ON THE PROPERTIES OF AL FILMS, Applied surface science, 91(1-4), 1995, pp. 239-245
Citations number
9
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
91
Issue
1-4
Year of publication
1995
Pages
239 - 245
Database
ISI
SICI code
0169-4332(1995)91:1-4<239:TEOIOT>2.0.ZU;2-B
Abstract
The influence of irradiation of Al or Al-based films on the surface mo rphology is studied by a number of methods. F, B, Mg, Cd, As, Sb, Ct a nd Ar were chosen as implanting species in order to cover a wide varie ty of chemical reactivities with aluminium. Implantation of boron and, to a lesser extent, of fluorine or chromium was found beneficial in s uppressing population of hillocks, predominantly those of medium or la rger size.