ON THE FORMATION OF SILICIDES ON POLY RUNNERS WITH TOPOGRAPHY BY A 2-STEP SILICIDATION PROCESS

The formation of titanium and cobalt silicide on poly runners with top ography is studied in this work. Poly runners with various topography heights and slopes were silicided by a two-step salicide process and i nspected by SEM and electrical measurements. Even though the topograph y was more severe than in current PBLOCOS processes, no electrical def ects in the continuity of the silicide were observed. Cross-section SE M reveals, however, that the metal coverage on the steps plays a major role in the continuity of the silicide formed.