Y. Baba et al., PHOTON-STIMULATED ION DESORPTION FROM CONDENSED SICL4 BY RESONANT EXCITATION AT THE K-EDGES, Surface science, 341(1-2), 1995, pp. 190-195
Photon-stimulated desorption of fragment and molecular ions from conde
nsed SiCl4 following the Si 1s and Cl 1s excitations has been investig
ated using synchrotron radiation, The Si+, Cl+, SiCl+ and SiCl3+ ions
were observed almost in comparable intensity at the Sits excitation. T
he presence of atomic Si+ ions is interpreted by the formation of SiCl
4n+ (n greater than or equal to 3) ions through KLL and successive LVV
Anger decay. On the other hand, more than 80% of the desorbed species
were Cl+ ions by the Cl 1s excitation, which suggests that the multip
le charges produced by the Auger decay localize on the chlorine atom.
The photon-energy dependence of the Cl+ yield revealed that the Cl+ yi
eld at the Cl 1s --> sigma(8a(1)) resonance excitation is higher than
that at the Cl 1s --> sigma(9t(2)) resonance excitation. It was also
found that the excitation at the energy higher than Cl 1s --> sigma
resonance scarcely induces the Cl+ desorption. The high desorption yie
ld at the Cl 1s --> sigma(8a(1)) resonance is interpreted by the fact
that the ga, orbital into which the Cl 1s electron is excited is most
ly composed of the Cl 3p antibonding state, which reduces the binding
energy of the Si-Cl bond.