BROADLY-TUNABLE RESONANT-CAVITY LIGHT-EMITTING DIODE

Microelectromechanical wavelength tuning is demonstrated for the first time in a resonant-cavity light-emitting diode. The device utilizes a deformable-membrane top mirror suspended by an air gap above a diode- active region and bottom mirror. Applied membrane-substrate bias produ ces an electrostatic force which reduces the air-gap thickness, and th erefore, the resonant wavelength. We report broad tunability of nearly 40 mn and spectral linewidths as narrow as 1.9 mn (2.6 meV) for opera tion near 950 mn.