S. Cattarin et Mm. Musiani, CHARACTERIZATION AND PROCESSING OF BIPOLAR SEMICONDUCTOR ELECTRODES IN A DUAL ELECTROLYTE CELL, Journal of the Electrochemical Society, 142(11), 1995, pp. 3786-3792
Photoelectrochemical (PEG) processes may be induced at both faces of a
bipolar semiconductor electrode without application of metal contacts
by using the dual electrolyte arrangement metal/electrolyte 1/semicon
ductor/electrolyte 2/metal and by applying a voltage to the end metal
electrodes. The possibilities of semiconductor characterization (deter
mination of action spectra and doping level) and processing (photoetch
ing and metal electrodeposition) are discussed on the basis of model e
xperiments, performed with n-InP wafers. The advantages of this approa
ch over traditional PEC and electroless techniques are discussed with
particular emphasis on etching.