Jh. Han et al., THERMODYNAMIC ANALYSIS OF BA-SR-TI OXIDE FILM COMPOSITIONS IN THE PROCESS OF METALLORGANIC CHEMICAL-VAPOR-DEPOSITION, Journal of the Electrochemical Society, 142(11), 1995, pp. 3980-3984
We have calculated the equilibrium composition of the solid phase prod
uced in the metallorganic chemical vapor deposition (MOCVD) process th
at uses Ba(2,2,6,6-tetramethyl-3,5-heptanedione)(2), Sr(2,2,6,6-tetram
ethyl-3,5-heptanedione)(2), Ti(O-i-C3H7)(4), and oxygen as reactants e
ither separately or together. The results indicate that barium stronti
um titanate (BST) films of good dielectric properties are obtained whe
n a proper amount of the Ti source is used in the chemical vapor depos
ition (CVD) feed. The Ti source is effective in modifying the Ba and S
r fractions in the BST films, but the Ba source is not so effective in
modifying the film composition. Oxygen addition to the feed suppresse
s graphite deposition but does not affect the metal composition of the
film.