ESD - TRANSIENT FIELDS, ARE SIMULATION AND RISE-TIME LIMIT

ESD is simulated by the combination of arc resistance laws and a metho d of moment algorithm. Simulated results are backed up by quantitative near-field measurement on model structures, real equipment and IEC 10 00-4-2 ESD simulators. It is shown that the arc resistance law by Romp e and Weizel and an electron avalanche model can be applied in ESD sim ulations. Other arc resistance laws fail. Disturbances by ESD are domi nated by the arc length, not directly by voltage. Are length is contro lled by voltage, speed of approach and time lag. For approaching objec ts ultimately field emission initiates sparking if the breakdown has n ot been initiated earlier by other processes. The onset of field emiss ion can be calculated by evaluation of the Fowler-Nordheim equation. U sing the resulting minimal arc length and an arc model a lower rise ti me limit of approx. 20 ps can be calculated.