Sh. Voldman et al., 3-DIMENSIONAL TRANSIENT ELECTROTHERMAL SIMULATION OF ELECTROSTATIC DISCHARGE PROTECTION CIRCUITS, Journal of electrostatics, 36(1), 1995, pp. 55-80
Transient electrothermal simulation of ESD protection circuits using t
he 3-D finite element device simulator will be shown to explain the el
ectrothermal physics in ESD protection circuits in 0.5 and 0.25 mu m c
hannel length CMOS technologies. Simulation, ESD and failure analysis
will be compared for evaluation of correlation.