ION-IMPLANTATION SYSTEM FOR NEAR-SURFACE STUDIES

Authors
VIRDI GS NATH N
Citation
Gs. Virdi et N. Nath, ION-IMPLANTATION SYSTEM FOR NEAR-SURFACE STUDIES, Review of scientific instruments, 66(11), 1995, pp. 5244-5248
Citations number
9
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
11
Year of publication
1995
Pages
5244 - 5248
Database
ISI
SICI code
0034-6748(1995)66:11<5244:ISFNS>2.0.ZU;2-W
Abstract
An ion-implantation system designed and fabricated indigenously is des cribed. It consists of a versatile ion source, Einzel lens system, EXH velocity filter, dose measuring equipment, and target chamber. The io n-implantation system fabricated has been used to prepare ion-implante d luminescent phosphors by implanting Sb+ ions into CaS. (C) 1995 Amer ican Institute of Physics.