DETERMINATION OF IMPURITIES IN SINGLE-CRYSTAL SILICON-CARBIDE BY INDUCTIVELY-COUPLED PLASMA-MASS SPECTROMETRY

Authors
KOZUKA S HAYASHI M MATSUNAGA H
Citation
S. Kozuka et al., DETERMINATION OF IMPURITIES IN SINGLE-CRYSTAL SILICON-CARBIDE BY INDUCTIVELY-COUPLED PLASMA-MASS SPECTROMETRY, Analytical sciences, 9(5), 1993, pp. 735-736
Citations number
6
Categorie Soggetti
Chemistry Analytical
Journal title
Analytical sciences → ACNP
ISSN journal
09106340
Volume
9
Issue
5
Year of publication
1993
Pages
735 - 736
Database
ISI
SICI code
0910-6340(1993)9:5<735:DOIISS>2.0.ZU;2-N