INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR

Authors
YEH CF KAO HW CHANG BS CHANG KL
Citation
Cf. Yeh et al., INVESTIGATION OF SI-SIO2 INTERFACE PROPERTIES FOR BONDED SILICON-ON-INSULATOR, Journal of materials science letters, 12(19), 1993, pp. 1506-1507
Citations number
8
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
12
Issue
19
Year of publication
1993
Pages
1506 - 1507
Database
ISI
SICI code
0261-8028(1993)12:19<1506:IOSIPF>2.0.ZU;2-8