I. An et al., HYDROGEN DIFFUSION AND REACTION PROCESSES IN THIN-FILMS INVESTIGATED BY REAL-TIME SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 233(1-2), 1993, pp. 276-280
We applied multichannel spectroscopic ellipsometry (SE) to study the k
inetics of thin film modification by hydrogen in vacuum and electroche
mical environments. In this paper, we focus on the hydrogenation of am
orphous silicon films in vacuum by exposure to thermally generated ato
mic hydrogen. The method developed to analyze the real time SE data in
this particular case is applicable to other processes, and results ar
e also included for the coloration Of WO3 by electrochemical incorpora
tion of H. Because the ellipsometer can provide spectra in (psi, DELTA
) from 1.5 to 4.5 eV in 16 ms, improved characterization of diffusion
and reaction kinetics can result, in comparison with previous work at
fixed photon energy.