REVERSE-BIAS ANNEALING KINETICS OF MG-H COMPLEXES IN INP

The reactivation kinetics of hydrogen-passivated Mg acceptors in InP h ave been studied by annealing experiments carried out with different r everse biases. It is shown using a new analysis that the actual dissoc iation energy of the Mg-H complexes can be estimated even without appl ying a sufficient reverse bias to overcome retrapping of H at the dopa nt site. The dissociation process follows a first-order kinetics and t he dissociation frequency and activation energy were estimated at vari ous depths ranging from the surface up to 0.5 mum using an empirical a nalysis of the experimental data. A bias-independent dissociation ener gy of 1.40 +/- 0.08 eV was obtained when estimated at the surface. An apparently higher dissociation energy results when calculated in the b ulk. This overestimation is pronounced for low-bias anneals and is exp lained as a result of retrapping. The concentration profile data is co nsistent with the positively charged state of the diffusing H in p-InP .