MONTE-CARLO SIMULATION OF KEV ELECTRON-TRANSPORT IN SOLID MEDIA

Transport of 1-10 keV electrons in solid media is investigated by mean s of a single scattering Monte Carlo scheme. Interaction of the incide nt electron with the target is modeled using bound atom elastic scatte ring cross sections, together with inelastic collision cross sections and excitation functions, for the weakly bound outer electrons, obtain ed from dielectric theory with a model dielectric function. Inelastic collisions of the incident particle with the tightly bound inner shell electrons of the target are sampled using semiclassical ionization cr oss sections. Representative backscattering and transmission calculati ons are presented and compared with experimental data.