THE INFLUENCE OF PRESSURE ON THE OPTICAL-PROPERTIES OF ARTIFICIAL MICROCAVITIES IN SILICON

Authors
XIAO ZH ENGSTROM O VIDOVIC N
Citation
Zh. Xiao et al., THE INFLUENCE OF PRESSURE ON THE OPTICAL-PROPERTIES OF ARTIFICIAL MICROCAVITIES IN SILICON, Semiconductor science and technology, 12(2), 1997, pp. 166-172
Citations number
19
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
Journal title
Semiconductor science and technology → ACNP
ISSN journal
02681242
Volume
12
Issue
2
Year of publication
1997
Pages
166 - 172
Database
ISI
SICI code
0268-1242(1997)12:2<166:TIOPOT>2.0.ZU;2-Y
Abstract
The effects of external pressure on artificial microcavities prepared by thermal bonding in silicon have been investigated using interferome ter techniques. The cavities were bounded on one side by a membrane. W hen a varying external pressure bends the membrane a corresponding var iation in the light flux leaving the interferometer due to interferenc e can be measured. A Fabry-Perot analysis can be applied locally to de scribe the interference phenomena. Numerical calculations based on the finite element method were performed to simulate the membrane bending and the light flux from the structure at different pressures.