H. Teisseyre et al., HOMOEPITAXIAL LAYERS OF GALLIUM NITRIDE GROWN BY METALORGANIC VAPOR-PHASE EPITAXY, Semiconductor science and technology, 12(2), 1997, pp. 240-243
Gallium nitride epitaxial layers were grown by metalorganic vapour pha
se epitaxy (MOVPE) on bulk GaN crystals. These substrates were grown a
t high temperature (about 1800 K) and high pressure (about 15 kbar). M
OVPE was carried out in a vertical growth chamber at atmospheric press
ure, NH3 was used as the nitrogen precursor. The layers were examined
using x-ray diffraction and optical photoluminescence. It was found th
at most of the layers exhibit smaller lattice constants than the subst
rates, which indicates a smaller concentration of point defects and fr
ee electrons. The photoluminescence spectra consist of sharp (down to
1.2 meV) near-band-edge peaks attributed to the excitons bound to neut
ral donors and broad yellow peaks centred at 2.3 eV.