HOMOEPITAXIAL LAYERS OF GALLIUM NITRIDE GROWN BY METALORGANIC VAPOR-PHASE EPITAXY

Citation
H. Teisseyre et al., HOMOEPITAXIAL LAYERS OF GALLIUM NITRIDE GROWN BY METALORGANIC VAPOR-PHASE EPITAXY, Semiconductor science and technology, 12(2), 1997, pp. 240-243
Citations number
15
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
ISSN journal
02681242
Volume
12
Issue
2
Year of publication
1997
Pages
240 - 243
Database
ISI
SICI code
0268-1242(1997)12:2<240:HLOGNG>2.0.ZU;2-4
Abstract
Gallium nitride epitaxial layers were grown by metalorganic vapour pha se epitaxy (MOVPE) on bulk GaN crystals. These substrates were grown a t high temperature (about 1800 K) and high pressure (about 15 kbar). M OVPE was carried out in a vertical growth chamber at atmospheric press ure, NH3 was used as the nitrogen precursor. The layers were examined using x-ray diffraction and optical photoluminescence. It was found th at most of the layers exhibit smaller lattice constants than the subst rates, which indicates a smaller concentration of point defects and fr ee electrons. The photoluminescence spectra consist of sharp (down to 1.2 meV) near-band-edge peaks attributed to the excitons bound to neut ral donors and broad yellow peaks centred at 2.3 eV.