J. Teichert et Ma. Tiunov, ACHROMATIC 2-STAGE EXB MASS FILTER FOR A FOCUSED ION-BEAM COLUMN WITHCOLLIMATED BEAM, Measurement science & technology, 4(7), 1993, pp. 754-763
A two-stage achromatic E x B mass separator has been designed for a hi
gh-current focused ion beam column with collimated beam. The separator
consists of two homogeneous field E x B filters, a stigmator and the
separation aperture. The second-order geometrical and chromatic aberra
tion coefficients are derived and their dependence on magnetic pole pi
ece and electrode geometry are investigated in performing electric and
magnetic field calculations. The influence of the mass separator on t
he spatial resolution of the column is discussed.