ACHROMATIC 2-STAGE EXB MASS FILTER FOR A FOCUSED ION-BEAM COLUMN WITHCOLLIMATED BEAM

Authors
TEICHERT J TIUNOV MA
Citation
J. Teichert et Ma. Tiunov, ACHROMATIC 2-STAGE EXB MASS FILTER FOR A FOCUSED ION-BEAM COLUMN WITHCOLLIMATED BEAM, Measurement science & technology, 4(7), 1993, pp. 754-763
Citations number
16
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
4
Issue
7
Year of publication
1993
Pages
754 - 763
Database
ISI
SICI code
0957-0233(1993)4:7<754:A2EMFF>2.0.ZU;2-5
Abstract
A two-stage achromatic E x B mass separator has been designed for a hi gh-current focused ion beam column with collimated beam. The separator consists of two homogeneous field E x B filters, a stigmator and the separation aperture. The second-order geometrical and chromatic aberra tion coefficients are derived and their dependence on magnetic pole pi ece and electrode geometry are investigated in performing electric and magnetic field calculations. The influence of the mass separator on t he spatial resolution of the column is discussed.