Cj. Hou et al., SUPERCONDUCTING BA0.6K0.4BIO3 - THIN-FILM PREPARATION BY RF MAGNETRONSPUTTERING, Journal of materials research, 8(8), 1993, pp. 1798-1804
Superconducting Ba0.6K0.4BiO3 thin films with transition temperatures
up to 25 K have been successfully grown on SrTiO3 substrates using RF
magnetron sputtering and postgrowth oxygen annealing. Systematic varia
tion of the sputtering process parameters showed that optimum films ca
n be grown on substrates heated to 400-degrees-C in a 10 mTorr atmosph
ere containing 96% Ar and 4% 02 and using a target containing Ba, K, a
nd Bi in ratios of 0.6: 1.2: 1.4. High transition temperature supercon
ductivity was observed only in highly oriented, crystalline films havi
ng the ideal stoichiometry, Ba0.6K0.4BiO3.