EARLY HISTORY OF X-RAY-LITHOGRAPHY AT IBM

Authors
SPILLER E
Citation
E. Spiller, EARLY HISTORY OF X-RAY-LITHOGRAPHY AT IBM, IBM journal of research and development, 37(3), 1993, pp. 291-297
Citations number
21
Categorie Soggetti
Computer Applications & Cybernetics
Journal title
IBM journal of research and development → ACNP
ISSN journal
00188646
Volume
37
Issue
3
Year of publication
1993
Pages
291 - 297
Database
ISI
SICI code
0018-8646(1993)37:3<291:EHOXAI>2.0.ZU;2-F
Abstract
We present a reconstruction of the early work on X-ray lithography at the IBM East Fishkill facility in 1969 and 1970 and a summary of the e fforts at the Thomas J. Watson Research Center in Yorktown Heights, Ne w York, between 1973 and 1976.