SCANNING-TUNNELING-MICROSCOPY OF THE INTERACTION OF HYDROGEN WITH SILICON SURFACES

This article focuses on recent scanning tunnelling microscopy studies that have led to an improved understanding of the interaction of hydro gen with silicon surfaces. The structure and bonding of the Si(111)-7 x 7 and Si(100)-2 x 1 surfaces are described together with the adsorpt ion and desorption of hydrogen from these surfaces. The role of hydrog en in the passivation of silicon surfaces and silicon chemical vapour deposition are also discussed.