An. Protsenko, A MECHANISM OF ION-BOMBARDMENT INDUCED RIPPLE TOPOGRAPHY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 82(3), 1993, pp. 417-420
Formation and development of ion bombardment induced morphology on the
surfaces of amorphous solids have been investigated by a computer sim
ulation code. The code calculates the surface topography depending on
the sputtering yield- incident angle function, distribution of sputter
ing yield along surface, reflection and shadow effect. It has been sho
wn that the main cause of the formation of the ripple morphology on th
e surface is the distribution of the sputtering yield along the surfac
e depending on the incident point and incident angle (''downstream'' e
ffect). The wavelength of the ripple depends on the range of the sputt
ering plot on the surface, and is 10-13 times the distance between the
impact point and the point of the maximum sputtering yield.