A LEED profile analysis of NaCl films grown epitaxially on Ge(100) was
carried out in order to determine the morphology of these films. Film
s of 3 and 8 double layers thickness were analysed. Due to steps of mo
natomic height of the Ge substrate, which do not fit to the NaCl latti
ce, the NaCl lattice is elastically strained over many lattice constan
ts forming an elastic ''carpet'' across these steps. Far away from the
se steps the films are in registry with the Ge substrate. This model d
escribes quantitatively the measured beam profiles, as tested both by
analytic calculations and by computer simulations, and correctly predi
cts an increase of the strained areas as a function of film thickness.