REAL-TIME OXIDATION MONITORING WITH A SURFACE-CHARGE ANALYZER

A technique for monitoring oxidation furnaces using a surface charge a nalyzer (SCA) is investigated. This tool produces excellent results wh en compared with the conventional capacitance-voltage (CV) techniques. SCA is more precise, significantly faster and easier, and more accura te than the traditional CV technique. The SCA agrees with the CV measu rements for 90% of the measurements, but is more reliable for identify ing true oxide quality fairs. The instances where the two techniques d id not agree were due almost exclusively to measurement errors with th e CV technique. SCA monitoring of oxidation furnaces easily can replac e the day-to-day monitoring now performed with the CV technique, and t he tool would pay for itself in labor alone in less than two years. Co nsidering all these issues, the SCA is an attractive option for oxidat ion furnace monitoring.