MEASUREMENT OF EXTREME-HIGH-VACUUM PRESSURE BY LASER IONIZATION

Authors
KOKUBUN K ICHIMURA S SEKINE S SHIMIZU H
Citation
K. Kokubun et al., MEASUREMENT OF EXTREME-HIGH-VACUUM PRESSURE BY LASER IONIZATION, JPN J A P 2, 32(8A), 1993, pp. 120001109-120001111
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
32
Issue
8A
Year of publication
1993
Pages
120001109 - 120001111
Database
ISI
SICI code
Abstract
Measurement of gas pressure using nonresonant multiphoton ionization h as been performed. As a result, extreme-high-vacuum (XHV) pressure to 7 X 10(-10) Pa was successfully measured by this method. The experimen tal results are presented, and problems related to noise are discussed .