NEW COMPENSATING 4-PHASE ALGORITHM FOR PHASE-SHIFT INTERFEROMETRY

Authors
SCHWIDER J FALKENSTORFER O SCHREIBER H ZOLLER A STREIBL N
Citation
J. Schwider et al., NEW COMPENSATING 4-PHASE ALGORITHM FOR PHASE-SHIFT INTERFEROMETRY, Optical engineering, 32(8), 1993, pp. 1883-1885
Citations number
7
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
32
Issue
8
Year of publication
1993
Pages
1883 - 1885
Database
ISI
SICI code
0091-3286(1993)32:8<1883:NC4AFP>2.0.ZU;2-0
Abstract
Phase-shift interferometry suffers from periodic systematic errors cau sed by erroneous reference phase adjustments and instabilities of the interferometer. A new method is described that uses only four interfer ograms and eliminates the errors caused by linear adjustment deviation s of the reference phase or the mean phase in the interferometer. Test results confirm the theoretical predictions.