SUBSTRATE SURFACE EFFECT ON THE LASER-INDUCED PLASMA CHARACTERISTICS FOR THIN-FILM DEPOSITION

Authors
PREDTECHENSKY MR BULGAKOV AV MAYOROV AP ROSHCHIN AV
Citation
Mr. Predtechensky et al., SUBSTRATE SURFACE EFFECT ON THE LASER-INDUCED PLASMA CHARACTERISTICS FOR THIN-FILM DEPOSITION, Applied superconductivity, 1(10-12), 1993, pp. 1995-2003
Citations number
23
Categorie Soggetti
Material Science","Physics, Applied","Physics, Condensed Matter
Journal title
Applied superconductivity → ACNP
ISSN journal
09641807
Volume
1
Issue
10-12
Year of publication
1993
Pages
1995 - 2003
Database
ISI
SICI code
0964-1807(1993)1:10-12<1995:SSEOTL>2.0.ZU;2-F
Abstract
The method for deposited flow with substrate interaction investigation named as ''Knudsen mesh'' method is developed. The substrate surface effect on laser plasma plume under condition corresponding to YBaCuO f ilm deposition is studied by this method used in conjunction with time -of-flight mass spectrometry. The plume characteristics near surface ( particle composition and velocities, shock layer formation dynamics) a re obtained. It is found that oxygen containing clusters are formed ef fectively within shock layer near substrate.