OXYGEN-TRANSFER WAYS FOR THE LASER DEPOSITION IN-SITU OF THE OXIDE HTSC FILMS

Oxygen transfer ways for the method of the laser deposition of YBaCuO films in an oxygen ambient and influence of the oxygen pressure on fil m properties have bee studied using O-18 isotope. It was shown more th en 40% of the oxygen are transferred into the films from the target an d about of 60% from the oxygen ambient at the deposition. During the c ooling of the films about 90% of the film oxygen were exchanged with t he environment atmosphere. It was found that substitution of O-16 ambi ent by O-18 one and, also, alteration in the oxygen pressure result in essential changes of the film quality. On the basis of the results, c onclusions for laser deposition are made.