The spectral sensitivity of a thinned backside illuminated CCD (TH 739
5A from Thomson TCS [1]) has been studied in the 10 to 20 nm spectral
range. We describe the readout device used for checks on the laser pla
sma source of the Ecole Polytechnique (LULI), as well as a comparison
between experimental results and theoretical simulations. A good agree
ment between calculations and experiment is obtained, the L absorption
edge of silicon giving the expected discontinuity of sensitivity arou
nd 12.3 nm. A relative spectral response of this CCD is provided for t
he investigated spectral range. We also describe two devices fitted wi
th this detector : a soft X-ray Schwarzschild microscope working at 19
.5 nm and a soft X-ray spectrometer working between 1 and 4 nm. Experi
mental results obtained with these devices on laser-matter interaction
experiments outline the gain in sensitivity with respect to films gen
erally used.