MULTICHAMBER RF GLOW-DISCHARGE SYSTEM FOR MAKING AMORPHOUS-SILICON BASED DEVICES

Authors
TRIPATHI SK DEVA D KUMAR S DIXIT PN AGARWAL SC
Citation
Sk. Tripathi et al., MULTICHAMBER RF GLOW-DISCHARGE SYSTEM FOR MAKING AMORPHOUS-SILICON BASED DEVICES, Indian Journal of Pure & Applied Physics, 31(9), 1993, pp. 660-663
Citations number
NO
Categorie Soggetti
Physics
Journal title
Indian Journal of Pure & Applied Physics → ACNP
ISSN journal
00195596
Volume
31
Issue
9
Year of publication
1993
Pages
660 - 663
Database
ISI
SICI code
0019-5596(1993)31:9<660:MRGSFM>2.0.ZU;2-I
Abstract
A multichamber system has been designed where layers of different hydr ogenated amorphous silicon alloys could be deposited on top of each ot her in different chambers without breaking vacuum, thus minimizing cro ss-contamination or contact with air.