Ya. Dryagin et al., BARRIER CAPACITANCE OF MILLIMETER PLANAR DIODES AND THEIR C V CHARACTERISTICS/, Instruments and experimental techniques, 36(3), 1993, pp. 412-415
A technique for measuring small capacitances at high frequencies is de
scribed. A test capacitor is connected to the output of a complex-gain
meter. The meter registers the phase variation in the reflection coef
ficient, which is sufficient even when a small lumped capacitor is con
nected to the output of the meter's coaxial line. At 3.8 GHz the fluct
uation threshold associated with the noise factor of the device was fo
und to be 5.10(-17)F and the dynamic range of the capacitance measurem
ent was approximately 0.25 pF.