HOW TO CHARACTERIZE THIN-FILMS FOR REAL-TIME PROCESS-CONTROL

Authors
Citation
Va. Yakovlev, HOW TO CHARACTERIZE THIN-FILMS FOR REAL-TIME PROCESS-CONTROL, Laser focus, 29(8), 1993, pp. 83
Citations number
6
Categorie Soggetti
Optics
Journal title
ISSN journal
10438092
Volume
29
Issue
8
Year of publication
1993
Database
ISI
SICI code
1043-8092(1993)29:8<83:HTCTFR>2.0.ZU;2-9