Jp. Boeuf et al., MODELING OF DISCHARGES AND NONTHERMAL PLASMAS - APPLICATIONS TO PLASMA PROCESSING, Surface & coatings technology, 59(1-3), 1993, pp. 32-40
We present an overview of models of low pressure, non-thermal gas disc
harges as commonly used in plasma processing. Significant progress has
been made in the past decade towards the goal of a self-consistent mo
del of the electrical properties of discharges, whether d.c., r.f. or
microwave discharges. These models are based on solutions of the charg
ed particle transport equations coupled with Poisson's equation for th
e electric field, and provide the space and time distribution of charg
ed particle densities, current densities and electric field or potenti
al. Some of the most sophisticated models also provide the electron an
d ion velocity distribution functions in the discharge at any point in
space or time. It is now possible to describe reasonably accurately t
he physical properties of a discharge (including the plasma, the elect
rode regions and the walls) for two-dimensional cylindrical geometries
, even for complex electrode configurations involving e.g. a hollow ca
thode or anode. A survey of the available models is presented here and
we illustrate the current state of the art by results from one- and t
wo-dimensional models of d.c., r.f. and transient discharges.