PREPARATION AND PERFORMANCE OF (CR,TI)N COATINGS DEPOSITED BY A COMBINED HOLLOW-CATHODE AND CATHODIC ARC TECHNIQUE

The deposition of (Cr,Ti)N on hardened cold-worked steel samples was p erformed in an industrial multisource deposition device consisting of two hollow cathode discharge evaporators and one cathodic arc evaporat or. The high and considerably ionized particle fluxes of the depositio n sources were directed on to the multiple rotation substrate holder. Special emphasis was laid on the effect of substrate position and move ment on the coating composition, properties and performance. In partic ular, the total film composition was strongly influenced. Substrate mo vement by means of a threefold rotating system resulted in an oscillat ing depth distribution of the components. Application of the additiona l arc source yielded a denser film structure. Results of hardness, str ess, friction and wear measurements are reported.