THE FORMATION OF TI(OCN) LAYERS PRODUCED FROM METAL-ORGANIC COMPOUNDSUSING PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION

Authors
WIERZCHON T SOBIECKI JR KRUPA D
Citation
T. Wierzchon et al., THE FORMATION OF TI(OCN) LAYERS PRODUCED FROM METAL-ORGANIC COMPOUNDSUSING PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION, Surface & coatings technology, 59(1-3), 1993, pp. 217-220
Citations number
6
Categorie Soggetti
Material Science
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
59
Issue
1-3
Year of publication
1993
Pages
217 - 220
Database
ISI
SICI code
0257-8972(1993)59:1-3<217:TFOTLP>2.0.ZU;2-K
Abstract
The paper describes the conditions necessary for producing surface lay ers on steel from a Ti(OiC3H7)4 + H-2 + N2 mixture using plasma-assist ed chemical vapour deposition. It presents the results of metallograph ic and scanning microscopy examinations and of electron probe microana lysis. The hardness, the wear resistance measured by the ''three-rolle rs taper'' technique and the corrosion resistance measured using a pot entiodynamic test are also given.