STRUCTURAL INVESTIGATION OF LOW-ENERGY ION-BEAM DEPOSITED DIAMOND-LIKE FILMS

Diamond-like films were deposited by ion beam deposition using various CH4/H-2 gas mixtures and beam voltages of 1000 V and below. The films have been examined by Fourier transform infrared spectroscopy (FTIR) and Raman microprobe spectroscopy. Both FTIR and Raman spectra indicat e an increase in the sp(2) content of these films for high hydrogen co ntent in the deposition gas. Raman spectroscopy also indicates an incr ease in the sp(2) order with beam voltage for low hydrogen content. Th ese results suggest that there are two competing mechanisms controllin g the film structure. For films deposited with low hydrogen content in the deposition gas the structure in beam voltage (ion energy) depende nt, whereas for high hydrogen contents there is no clear beam voltage (energy) dependence.