RANGES AND VARIANCES OF 0.2-1.0 KEV HYDROGEN AND DEUTERIUM IONS IMPLANTED INTO BE, C AND SI

Authors
LEBLANC L ROSS GG
Citation
L. Leblanc et Gg. Ross, RANGES AND VARIANCES OF 0.2-1.0 KEV HYDROGEN AND DEUTERIUM IONS IMPLANTED INTO BE, C AND SI, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 83(1-2), 1993, pp. 15-20
Citations number
20
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
83
Issue
1-2
Year of publication
1993
Pages
15 - 20
Database
ISI
SICI code
0168-583X(1993)83:1-2<15:RAVO0K>2.0.ZU;2-H
Abstract
The ion beam analysis technique of elastic recoil detection with an el ectromagnetic filter has been used to measure the mean ranges and vari ances of 0.2-1.0 keV H and D ions implanted in Be, C and Si. Two corre sponding Monte Carlo (BABOUM and TRIM) code calculations have also bee n performed and compared. Other theoretical and experimental results a re included. Power law fits as a function of energy, R(p) = R0E(n), ha ve been adjusted to the ranges and a general function is deduced which allows a rapid estimation of the mean ranges.