MEASUREMENTS OF DIFFUSION-COEFFICIENT OF CF2 RADICAL IN DC PULSED CF4DISCHARGE PLASMA

Authors
ARAI T GOTO M ASOH Y TAKAYAMA D SHIMIZU T
Citation
T. Arai et al., MEASUREMENTS OF DIFFUSION-COEFFICIENT OF CF2 RADICAL IN DC PULSED CF4DISCHARGE PLASMA, JPN J A P 2, 32(10A), 1993, pp. 120001469-120001470
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
32
Issue
10A
Year of publication
1993
Pages
120001469 - 120001470
Database
ISI
SICI code
Abstract
Laser-induced fluorescence has been used to measure the CF2 radical gr ound-state densities after extinction of DC pulsed CF4 discharge plasm a. From the measurement, the CF2 radical was shown to be removed mainl y by a diffusion process. Its diffusion coefficient was found to be D= 65 cm2.Torr.s-1 in CF4 at room temperature.