INVESTIGATION OF THE KINETICS OF MOCVD WITH A STAGNATION CELL

Authors
GORBENKO OY DECKER W WAHL G
Citation
Oy. Gorbenko et al., INVESTIGATION OF THE KINETICS OF MOCVD WITH A STAGNATION CELL, Journal de physique. IV, 3(C3), 1993, pp. 25-33
Citations number
20
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
3
Issue
C3
Year of publication
1993
Pages
25 - 33
Database
ISI
SICI code
1155-4339(1993)3:C3<25:IOTKOM>2.0.ZU;2-M
Abstract
Solutions of the mass transfer equation in the stagnation cell are des cribed. It is shown that the application of the stagnation cell can be used for the determination of Da(s), distinguishing different types o f process control, sensoring gas phase condensation and homogeneous nu cleation. The results obtained with cylindrical cell for MOCVD of YBCO are discussed.